Fluorinated Gas Purifiers
Impurities removed can include H2O, CO, CO2, O2, H2 and NMHC. Impurities in these gases are reduced to less than 1 part-per-billion.
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- Purifier Lifetime
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- Bypass / Piping Manifolds
To select a purifier please choose: |
Part Number Example |
| 1. Model Size | MC1 |
| 2. Purification Media | -202 |
| 3. Options (F = 0.003µm Particle Filter or V = Inlet/Outlet Isolation Valves) | FV |
| Part number breakdown |
| Model Size | Average Flow (slpm) For lifetime guidance |
Max Flow (slpm) | Max Pressure (psig) | Drawing |
| MC1 | 0.5 | 5 | 1,000 | Drawing |
| MC45 | 1.5 | 10 | 1,000 | Drawing |
| MC50 | 1.5 | 10 | 1,000 | Drawing |
| MC190 | 5 | 50 | 250 | Drawing |
| MC200 | 5 | 50 | 250 | Drawing |
| MC400 | 9 | 60 | 250 | Drawing |
| MC450 | 10 | 75 | 250 | Drawing |
| MC500 | 12 | 100 | 250 | Drawing |
| MC700 | 25 | 120 | 250 | Drawing |
| MC1500 | 40 | 250 | 250 | Drawing |
| MC2525 | 80 | 300 | 250 | Drawing |
| MC2550 | 80 | 500 | 250 | Drawing |
| MC3000 | 80 | 500 | 250 | Drawing |
| MC4500 | 200 | 1,000 | 250 | Drawing |
| MC9000 | 300 | 1,000 | 250 | Drawing |
| MC14K | 400 | 2,000 | 250 | Drawing |
| High Pressure Models | ||||
| HP190 | 5 | 50 | 1,000 | Drawing |
| HP400 | 9 | 60 | 1,000 | Drawing |
| HP700 | 25 | 120 | 1,000 | Drawing |
| HP3000 | 80 | 500 | 1,000 | Drawing |
| SP70 | 1.5 | 20 | 3,000 | Drawing |
| SP300 | 10 | 100 | 3,000 | Drawing |
| SP600 | 15 | 200 | 3,000 | Drawing |
| Special 'U' shaped Manifold | ||||
| PG1 | 10 | 15 | 250 | Drawing |
| Media | Gases Purified | Impurities Removed | Regenerable | Specification |
| 902 | C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CCl4, CF4, CH4, CHF3, SF6, N2O | H2O, CO, CO2, O2, H2 < 100 ppt Volatile Acids, Organics, Refractory compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
Yes | Specification |
| Option | Description | Comments |
| F | 0.003 µm Particle Filter option | If not ordered, 2 µm filter standard |
| HF | 0.003 µm high-flow Particle Filter option | For use with MC4500 model only |
| V | Inlet and outlet valves | 1/4" or 1/2" Manual diaphragm Valves |
