Flat Panel Display Applications

The Flat Panel Display market, either based on TFT-LCD or AMOLED (which comprise the majority of the global display market) must keep increasing their production efficiency to continue decreasing production costs. Purity and reliability of the process gases during flat panel display manufacturing is vital to avoid defects and can be easily achieved by means of efficient gas purification systems. SAES Pure Gas purifiers cover a very wide range of flow rates from 10 sccm to over 20,000 Nm³/hr.

Gases Used:

• Nitrogen (N₂)
• Hydrogen (H₂)
• Argon (Ar)
• Oxygen (O₂)
• Helium (He)
• Ammonia (NH₃)
• Nitrous Oxide (N₂O)
• Silane (SiH₄)
• Chlorine (Cl₂)
• Carbon Dioxide (CO₂)