Oxygen Gas Purifier Overview
Ambient Temp (MicroTorr Canister Purifier)
- H2O, CO, CO2, Acids, Bases, Organics, Refractory Compound Removal < 1ppb
- 0 - 1,000 slpm
Catalyst and Adsorber (PS6 MegaTorr Purifier)
- H2O, CO, CO2, H2, THC Removal < 1ppb
- 300+ slpm
- CO, H2, THC Conversion < 1ppb
- 0-100 slpm
NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
Contact Information
New Purifiers
(Sales)
Phone: +1-805-541-9299
Email: gp.sales@entegris.com
Installed Purifiers
(Field Service Engineers)
USA: +1-800-934-3628
International: +1-805-781-2392
Email:
gp.fse@entegris.com