Oxygen Bulk Gas Purifier - PS6
The MegaTorr Oxygen Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS6 series uses catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, CH4, H2, and H2O are reduced to below parts per billion (ppb) levels.
Hydrocarbons (CH4), CO and H2 react at elevated temperatures with O2 in the oxidizing catalyst vessel to form CO2 and H2O which are then removed in the ambient temperature downstream adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with purified oxygen at elevated temperatures.
STANDARD FEATURES
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Gas to Gas Heat Exchanger
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
OPTIONAL FEATURES
- Inlet & Outlet Isolation Valves
- Mass flow meter
- Inlet & Outlet Pressure Transducers
- Instrument Air Management System
- Air Cooled Heat Exchanger
- Auto or Manual Bypass
- Ultrafine 0.003 micron Particle Filter
- Separate Control Power
- MODBUS Data Communication Port
| PS6 Performance | ||
| Gas Purified | Impurities Removed | Outlet Performance |
| O2 | H2O, CO, CO2, H2, CH4 | < 1 ppb |
| Note: Purifiers are gas specific and should only be used for the gas indicated | ||
| PS6 - Specification | |||||||
| Model | Maximum Flow (Nm3/hr) |
Average Power Consumption (kW) |
Maximum Pressure Drop (bar) |
Dimensions (cm) | Weight (kg) |
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| H | W | D | |||||
| PS6-MGT15-O | 15 | 1.4 | 0.7 | 193 | 89 | 84 | 600 |
| PS6-MGT30-O | 30 | 2.3 | 0.7 | 193 | 89 | 84 | 600 |
| PS6-MGT60-O | 60 | 3.2 | 0.7 | 193 | 89 | 84 | 600 |
| PS6-MGT100-O | 100 | 5.9 | 0.7 | 193 | 132 | 135 | 1700 |
| PS6-MGT200-O | 200 | 9.1 | 0.7 | 193 | 132 | 135 | 1700 |
| Other flow rates available, please consult the factory for details. For flow rates less than 6 Nm3/hr (100 slpm) a Catalyst (PS15) can be used, followed by an Ambient Temperature MicroTorr Purifier. |
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Pictures (click to enlarge) |
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PS6-MGT15 Oxygen Purifier
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PS6-MGT60 Oxygen Purifier
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PS6-MGT100 Oxygen Purifier |
PS6-MGT150 Oxygen Purifier |
For outdoor installation see our outdoor enclosure options (OPAL)
Factory regenerable bulk gas purifiers, PS14
