Helium Gas Purifier Overview
Ambient Temp (MicroTorr Canister Purifier)
- H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
- Also available: Acids, Bases, Refractory Compounds Removal
Heated Getter <100 slpm (MonoTorr Purifier)
- H2O, O2, CO, CO2, H2, N2, THC Removal < 1ppb
- 0 - 100 slpm
- 0 – 200 sccm (PS2-GC50-R)
- 200 sccm – 5 slpm (PS3-MT3-R)
- 5 slpm – 50 slpm (PS4-MT3-R and PS4-MT15-R)
- 50 slpm – 100 slpm (PS4-MT50-R)
Heated Getter >100 slpm (PS5 MegaTorr Purifier)
- H2O, O2, CO, CO2, H2, N2, THC Removal < 1ppb
- 100 - 3,300 slpm
NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
Contact Information
New Purifiers
(Sales)
Phone: +1-805-541-9299
Email: gp.sales@entegris.com
Installed Purifiers
(Field Service Engineers)
USA: +1-800-934-3628
International: +1-805-781-2392
Email:
gp.fse@entegris.com
