Rare Gas/Nitrogen Purification - PS3-MT3
Research has shown that gas purification ensures consistent and repeatable process performance for semiconductor device manufacturing. Point of Use Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination.
The MonoTorr purifiers provide essential purification for Nitrogen and Rare Gases at flow rates up to 5 slpm. The all metal getter material removes impurities to < 1 ppb (refer to chart below).
Features
- Fully automatic controller with fault protection and audible alarm
- 0.003 µm stainless steel particle filter
- Low cost of ownership
- Replaceable cartridge
| PS3-MT3 Outlet Performance | ||
| Gases Purified | Impurities Removed | Outlet Performance |
| N2 | H2O, O2, CO, CO2, H2, CH4 | < 1 ppb |
| He, Ar, Xe | H2O, O2, CO, CO2, H2, CH4, N2 | < 1 ppb |
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Note: Purifiers are gas specific and should only be used for the gas indicated |
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Ordering Information |
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| Part Number | Gas Purified | Power |
| PS3-MT3-R-1 | He, Ar, Xe | 110-120 VAC |
| PS3-MT3-N-1 | N2 | 110-120 VAC |
| PS3-MT3-R-2 | He, Ar, Xe | 220-240 VAC |
| PS3-MT3-N-2 | N2 | 220-240 VAC |
| Optional Equipment | ||
| BYPS-3 | Bypass assembly | |
| PS3-APIMS | APIMS certification to 1 ppb | |
| Spare Parts (Replacement cartridges are field replicable) | ||
| PF3-C3-R-1 | He, Ar, Xe | 110-120 VAC |
| PF3-C3-N-1 | N2 | 110-120 VAC |
| PF3-C3-R-2 | He, Ar, Xe | 220-240 VAC |
| PF3-C3-N-2 | N2 | 220-240 VAC |
Picture of PS3 Purifier (click to enlarge)
