Other Gases Purifier Overview
- Organics < 1ppb
- 0 - 1,000 slpm
- H2O, O2, CO2, Acids, Bases, Organics, Refractory Compounds Removal < 1ppb
- 0 - 1,000 slpm
- H2O, O2 Removed <1 ppb
- 0 - 125 slpm
- H2O, O2, CO, CO2, H2, N2, THC Removal < 1ppb
- 0 – 3 slpm
- 3 slpm – 9 slpm
- 9 slpm – 30 slpm
- H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
- Also available: Acids, Bases, Refractory Compounds Removal
- 0 - 1,000 slpm
[C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CCl4, CF4, CH4, CHF3, SF6 ]
- H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
- 0 - 1,000 slpm
[B2H6, BCl3, CClH3, Cl2, CO2, GeCl4, GeH4, H2S, H2Se, HBr, HCl, N2O, NF3, NO, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3 ]
- H2O Removal < 1ppb
- 0 - 500 slpm
- H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
- Wall mounted canister (FaciliTorr)
- H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
- Floor mounted column in a frame (PS14 MegaTorr)
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
