Methane (CH4) Gas Purifier Overview
Heated Getter (MonoTorr Purifier)
- H2O, O2, CO, CO2, H2, N2, THC Removal < 1ppb
- < 1 slpm
Ambient Temperature (MicroTorr Canister Purifier)
- H2O, O2, CO, CO2, H2 Removal < 1ppb
- < 1,000 slpm
NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
Contact Information
New Purifiers
(Sales)
Phone: +1-805-541-9299
Email: gp.sales@entegris.com
Installed Purifiers
(Field Service Engineers)
USA: +1-800-934-3628
International: +1-805-781-2392
Email:
gp.fse@entegris.com
