Xenon, Neon, Krypton Heated Getter Overview

Heated Getter <100 slpm

• H₂O, O₂, CO, CO₂, H₂, N₂, THC Removal < 1ppb
  • 0 – 3 slpm
  • 3 slpm – 9 slpm
  • 9 slpm – 30 slpm

NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30