Corrosive and Specialty Gas Purifiers
HCl, Cl2, B2H6, BCl3, CClH3, GeCl4, GeH4, H2S, H2Se, HBr, NF3, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3
These Corrosive and Specialty Gas Purifiers remove impurities such as H2O and metals to < 1 ppb (part-per-billion). Each gas purifier comes standard with a 0.003µm particle filter at the outlet.
- Brochure
- Request a quote / Contact Us
- Representatives USA / International
- Help Me Select A Purifier
- Purifier Lifetime
- SDS
- Bypass / Piping Manifolds
To select a purifier please choose: |
Part Number Example |
| 1. Model Size | MC1 |
| 2. Purification Media | -202 |
| 3. Options (F = 0.003µm Particle Filter or V = Inlet/Outlet Isolation Valves) | FV |
| Part number breakdown |
| Model Size | Average Flow (slpm) For lifetime guidance |
Max Flow (slpm) | Max Pressure (psig) | Drawing |
| MC1 | 0.5 | 5 | 1,000 | Drawing |
| MC45 | 1.5 | 10 | 1,000 | Drawing |
| MC50 | 1.5 | 10 | 1,000 | Drawing |
| MC190 | 5 | 50 | 250 | Drawing |
| MC400 | 9 | 60 | 250 | Drawing |
| MC450 | 10 | 75 | 250 | Drawing |
| MC500 | 12 | 100 | 250 | Drawing |
| MC700 | 25 | 120 | 250 | Drawing |
| MC1500 | 40 | 250 | 250 | Drawing |
| MC2525 | 80 | 300 | 250 | Drawing |
| MC2550 | 80 | 500 | 250 | Drawing |
| MC3000 | 80 | 500 | 250 | Drawing |
| High Pressure Models | ||||
| HP190 | 5 | 50 | 1,000 | Drawing |
| HP400 | 9 | 60 | 1,000 | Drawing |
| HP700 | 25 | 120 | 1,000 | Drawing |
| HP3000 | 80 | 500 | 1,000 | Drawing |
| Other 1,000 psi configurations available, please consult the factory for details | ||||
| Special 'U' shaped Manifold | ||||
| PG1 | 10 | 15 | 250 | Drawing |
| Media | Gases Purified | Impurities Removed | Regenerable | Specification |
| 302 |
HCl, Cl2, B2H6, BCl3, CClH3, GeCl4, GeH4, H2S, H2Se, HBr, NF3, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3 |
H2O < 1 ppb Metals < 1 ppb |
No | Specification |
| Option | Description | Comments |
| F | 0.003 µm Particle Filter option | Standard (not optional) |
| V | Inlet and outlet valves | 1/4" or 1/2" Manual diaphragm Valves |
