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200 sccm - 5 slpm
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5 slpm - 50 slpm
50 slpm - 100 slpm
100 slpm +
Ambient Temp (Canister)
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Ambient Temp (Canister)
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Ambient Temp (Canister)
Heated Getter <100 slpm
Heated Getter >100 slpm
0 - 200 sccm
200 sccm - 5 slpm
5 slpm - 50 slpm
50 slpm - 100 slpm
Ambient Temp (Canister)
Heated Getter <100 slpm
Heated Getter >100 slpm
0 - 200 sccm
200 sccm - 5 slpm
5 slpm - 50 slpm
50 slpm - 100 slpm
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0 - 3 slpm
3 slpm - 9 slpm
9 slpm - 30 slpm
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Part Number Example-MicroTorr
