CO2 (Carbon Dioxide) Gas Purifier Overview
In-line Ambient Temperature (MicroTorr Canister Purifier)
- H2O, O2, H2, CO, Acids, Bases, Organics, Refractory Compounds, Metals Removal
- 0 - 1,000 slpm
Automatically Regenerable (PS31 MegaTorr Purifier)
- H2O, Acids, Bases, Organics, Refractory Compounds Removal
- 0 - 8,000 slpm
Automatically Regenerable (PS32 MegaTorr Purifier)
- H2O, O2, H2, CO, Acids, Bases, Organics, Refractory Compounds Removal
- 0 - 8,000 slpm
Automatically Regenerable (PS33 MegaTorr Purifier)
- H2O, O2, H2, CO, Acids, Bases, THC, Organics, Refractory Compounds Removal
- 0 - 8,000 slpm
NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
Contact Information
New Purifiers
(Sales)
Phone: +1-805-541-9299
Email: gp.sales@entegris.com
Installed Purifiers
(Field Service Engineers)
USA: +1-800-934-3628
International: +1-805-781-2392
Email:
gp.fse@entegris.com
