CO2 Gas Purifier - PS33
Heated Catalyst and Regenerable Dual Adsorbers
The MegaTorr Carbon Dioxide Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS33 series uses an adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. The first purification step is a heated catalyst vessel which converts THC, H2, and CO into CO2 and H2O. Also in the PS33 purifier are dual adsorber vessels which alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with nitrogen, hydrogen, and process gas at elevated temperatures.
STANDARD FEATURES
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Gas to Gas Heat Exchanger
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
OPTIONAL FEATURES
- Mass flow meter
- Inlet & Outlet Pressure Transducers
- Instrument Air Management System
- Auto or Manual Bypass
- Ultrafine 0.003 micron Particle Filter
- Separate Control Power
- MODBUS Data Communication Port
| PS33 Performance | |
| Gas Purified | Impurities Removed |
| CO2 | H2O removed to < 1 ppb |
| O2 removed to < 1 ppb | |
| H2 removed to < 1 ppb | |
| CO removed to < 1 ppb | |
| Total Volatile Acids (as SO2) removed to < 5 ppt | |
| THC (as Methane) removed to < 1 ppb | |
| Condensable Organics (HC's >100 amu, as Decane) removed to < 150 ppt | |
| Non-Condensable Organics (HC's >58 amu, as Toluene) removed to < 1 ppb | |
| Refractories (as HMDSO) removed to < 5 ppt | |
| Total Volatile Bases (as NH3) removed to < 500 ppt | |
| Note: Purifiers are gas specific and should only be used for the gas indicated | |
| PS33 - Specification | |||||||
| Model | Maximum Flow (Nm3/hr) |
Average Power Consumption (kW) |
Maximum Pressure Drop (bar) |
Dimensions (cm) | Weight (kg) |
||
| H | W | D | |||||
| PS33-MGT | 0 - 500 | Consult factory for specification details | |||||
For outdoor installation see our outdoor enclosure options (OPAL)
Factory regenerable bulk gas purifiers, PS14
