Nitrogen Gas Purifier Overview

Ambient Temp (Point-of-Use MicroTorr Canister)

• H₂O, O₂, CO, CO₂, H₂, NMHC Removal < 1ppb
• Also available: Acids, Bases, Refractory Compounds Removal
• 0 - 1,000 slpm

Ambient Temp (Auto Regen PS8)

• H₂O, O₂, CO, CO₂, H₂ Removal < 1ppb
• 300+  slpm

Catalyst and Adsorber (PS9) 

• H₂O, O₂, CO, CO₂, H₂, THC Removal < 1ppb
• 300+  slpm 

Heated Getter <100 slpm (MonoTorr)

• H₂O, O₂, CO, CO₂, H₂, THC Removal < 1ppb
• 0-100 slpm
  
• • 0 – 200 sccm (PS2-GC50-N)
  
  
• • 200 sccm – 5 slpm (PS3-MT3-N)
  
  
• • 5 slpm – 50 slpm (PS4-MT3-N and PS4-MT15-N)
  
  
• • 50 slpm – 100 slpm (PS4-MT50-N)

NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30