Nitrogen Bulk Gas Purifier - PS9
The Nitrogen MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS9 series uses dual catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CH4, CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels. If CH4 removal is not required the PS8 Adsorber Only Purifier can be used.
In the PS9 Nitrogen Bulk Gas Purifier, Hydrocarbons (CH4), CO and H2 react at elevated temperatures with O2 or CDA in the oxidizing catalyst vessel to form CO2 and H2O which, along with O2, are then removed in the ambient temperature adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature. The PS9 platform can be manufactured to flow rates from 15 Nm3/hr to 3,000 Nm3/hr.
STANDARD FEATURES
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Gas to Gas Heat Exchanger
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
- Hydrogen Blending Station
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
OPTIONAL FEATURES
- Inlet & Outlet Isolation Valves
- Mass flow meter with 4-20mA Output
- Inlet & Outlet Pressure Transducers
- Instrument Air Management System
- Cooling Water Management System
- Water Cooled Heat Exchanger
- Auto or Manual Bypass
- Particle Filter
- Separate Control Power
- MODBUS Data Communication Port
| PS9 Performance | ||
| Gas Purified | Impurities Removed | Outlet Performance |
| N2 | H2O, O2, CO, CO2, H2, CH4 | < 1 ppb |
| Note: Purifiers are gas specific and should only be used for the gas indicated | ||
| PS9 Specifications | ||||||
| Model | Maximum Flow (Nm3/hr) |
Maximum Pressure Drop (bar) |
Dimensions (cm) | Weight (kg) |
||
| H | W | D | ||||
| PS9-MGT15 - PS9-MGT60 | 15 - 60 | 0.7 | 193 | 89 | 84 | <600 |
| PS9-MGT100 - PS9-MGT200 | 100 - 200 | 1 | 193 | 132 | 135 | <1,700 |
| PS9-MGT300 - PS9-MGT400 | 300 - 400 | 1 | 214 | 148 | 196 | <3,100 |
| PS9-MGT500 - PS9-MGT700 | 500 - 700 | 1 | 237 | 237 | 191 | <3,850 |
| PS9-MGT800 - PS9-MGT1800 | 800 - 1,800 | 1 | 266 | 253 | 315 | <6,800 |
| PS9-MGT2000 - PS9-MGT3000 | 2,000 - 3,000 | 1 | 274 | 254 | 412 | <8,700 |
