Nitrogen Bulk Gas Purifier - PS8
The Nitrogen PS8 MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS8 series uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels.
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature. The PS8 platform can be manufactured from flow rates of 5 to 20,000 Nm3/hr.
Standard Features:
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
- Hydrogen Blending Station
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
Optional Features:
- Inlet & Outlet Isolation Valves
- Mass flow meter with 4-20mA Output
- Inlet & Outlet Pressure Transducers
- Auto or Manual Bypass
- Instrument Air Management System
- Ultrafine 0.003 micron particle filter
- Separate control power
| PS8 Performance | ||
| Gas Purified | Impurities Removed | Outlet Performance |
| N2 | H2O, O2, CO, CO2, H2 | <1 ppb |
| PS8 Specifications | ||||||
| Model | Maximum Flow (Nm3/hr) |
Maximum Pressure Drop (bar) |
Dimensions (cm) | Weight (kg) |
||
| H | W | D | ||||
| PS8-MGS10 - PS8-MGS40 | 10 - 40 | <0.7 | 138 | 80 | 40 | < 110 |
| PS8-MGS50 - PS8-MGS60 | 50 - 60 | <0.7 | 168 | 87 | 61 | < 180 |
| PS8-MGS90 - PS8-MGS120 | 90 - 120 | <0.7 | 165 | 100 | 70 | < 300 |
| PS8-MGT200 - PS8-MGT300 | 200 - 300 | <0.7 | 193 | 132 | 135 | < 1,500 |
| PS8-MGT400 - PS8-MGT600 | 400 - 600 | <0.7 | 211 | 148 | 196 | < 2,300 |
| PS8-MGT700 - PS8-MGT1000 | 700 - 1,000 | <0.7 | 209 | 191 | 236 | < 2,300 |
| PS8-MGT1200 - PS8-MGT3000 | 1,200 - 3,000 | <0.7 | 265 | 252 | 262 | < 5,500 |
| PS8-MGT4000 - PS8-MGT10000 | 4,000 - 10,000 | <1 | 267 | 252 | 467 | < 25,500 |
| > PS8-MGT10000 | Models available. Please contact the factory for details. | |||||
|
Pictures (click to enlarge) |
|
|
|
|
|
PS8-MGS60 Nitrogen Purifier |
PS8-MGT600 Nitrogen Purifier
|
|
|
|
|
PS8-MGT3000 Nitrogen Purifier
|
PS8-MGT6000 Nitrogen Purifier
|
|
|
|
|
PS8-MGT10000 Nitrogen Purifier
|
|
For outdoor installation see our outdoor enclosure options (OPAL)
Factory regenerable bulk gas purifiers, PS14
