Hydrogen Gas Purifiers
Micro-Channel Palladium Membrane Purifiers
- H2O, O2, CO, CO2, N2, THC, He, Ar Removal < 1 ppbV
- Absolute purification technology – all impurities removed
- Purifiers any inlet gas quality to 99.9999999% purity
- 0 - 2,170 slpm
Ambient Temp (Point-of-Use MicroTorr Canister)
- H2O, O2, CO, CO2, NMHC Removal < 1ppb
- Also available: Acids, Bases, Refractory Compounds Removal
- 0 - 1,000 slpm
Ambient Temp (Auto Regen PS7-A Adsorber Only)
- H2O, O2, CO, CO2, NMHC Removal < 1ppb
- 300+ slpm
- H2O, O2, CO, CO2, N2, NMHC Removal < 1ppb
- 0 - 100 slpm
- 5 slpm – 50 slpm (PS4-MT3-H and PS4-MT15-H)
- 50 slpm – 100 slpm (PS4-MT50-H)
- 100 slpm + (CH4 Removal) (PS7-G Getter Bed Only - 6.0N H2 Required)
Heated Getter and Adsorbers (PS7-H)
- H2O, O2, CO, CO2, N2, THC Removal < 1ppb
- 100+ slpm
NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
Contact Information
New Purifiers
(Sales)
Phone: +1-805-541-9299
Email: gp.sales@entegris.com
Installed Purifiers
(Field Service Engineers)
USA: +1-800-934-3628
International: +1-805-781-2392
Email:
gp.fse@entegris.com