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Hydrogen Gas Purifiers

Micro-Channel Palladium Membrane Purifiers

  • H2O, O2, CO, CO2, N2, THC, He, Ar Removal < 1 ppbV
  • Absolute purification technology – all impurities removed
  • Purifiers any inlet gas quality to 99.9999999% purity
  • 0 - 2,170 slpm

Ambient Temp (Point-of-Use MicroTorr Canister)

  • H2O, O2, CO, CO2, NMHC Removal < 1ppb
  • Also available: Acids, Bases, Refractory Compounds Removal
  • 0 - 1,000 slpm

Ambient Temp (Auto Regen PS7-A Adsorber Only)

  • H2O, O2, CO, CO2, NMHC Removal < 1ppb
  • 300+  slpm

Heated Getter

  • H2O, O2, CO, CO2, N2, NMHC Removal < 1ppb
  • 0 - 100 slpm
    • 5 slpm – 50 slpm (PS4-MT3-H and PS4-MT15-H)
    • 50 slpm – 100 slpm (PS4-MT50-H)
    • 100 slpm + (CH4 Removal) (PS7-G Getter Bed Only - 6.0N H2 Required)

Heated Getter and Adsorbers (PS7-H)

  • H2O, O2, CO, CO2, N2, THC Removal < 1ppb
  • 100+  slpm

NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30

 

Contact Information

New Purifiers
(Sales)

Phone: +1-805-541-9299
Email: gp.sales@entegris.com

Installed Purifiers
(Field Service Engineers)

USA: +1-800-934-3628
International: +1-805-781-2392
Email:
gp.fse@entegris.com

 

 

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