Hydrogen Heated Getter Overview

Heated Getter <100 slpm (MonoTorr) 

• H2O, O2, CO, CO2, N2, NMHC Removal < 1ppb
  • 5 slpm – 50 slpm (PS4-MT3-H and PS4-MT15-H)
  • 50 slpm – 100 slpm (PS4-MT50-H)

Heated Getter >100 slpm (PS7-G Getter Bed Only, 6N H₂ Required)

• H2O, O2, CO, CO2, N2, THC Removal < 1ppb
• 100+ slpm

Heated Getter and Adsorbers (PS7-H)

• H2O, O2, CO, CO2, N2, THC Removal < 1ppb
• 100+ slpm

NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30