Nitrogen Heated Getter Overview

Heated Getter <100 slpm

• H₂O, O2, CO, CO₂, H₂, THC Removal < 1ppb
• 0 - 100 slpm
  • 0 – 200 sccm (PS2-GC50-N)
  • 200 sccm – 5 slpm (PS3-MT3-N)
  • 5 slpm – 50 slpm (PS4-MT3-N and PS4-MT15-N)
  • 50 slpm – 100 slpm (PS4-MT50)

NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30