Argon and Helium Bulk Gas Purifier - PS5
The PS5 MegaTorr Rare Gas purifiers are heated getter-based purifiers designed specifically to provide ultra-high purity (UHP) Helium or Argon gas for semiconductor applications. The patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds. Impurities removed will not be released under any circumstances when the purifier is operated within specification. Outlet impurity levels for O2, H2O, CO, CO2, H2, CH4 (THC or Total Hydrocarbons) and N2 are reduced to parts per billion concentrations. These Purifiers are designed to last multiple years, but the lifetime depends on the inlet impurity concentrations and the average flow rate. Please contact the factory for lifetime calculations. Once the column is consumed it can be replaced with a new column, for a new lifetime. Downstream of the heated getter columns, Hydrogen impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU).
Fully automatic operation is provided standard with the microprocessor-based controller and full instrumentation. Multi-tiered fault protection keeps gas flowing while alerting the operator of any problems. Long getter life is achieved through efficient getter bed designs, which safely optimize operating temperature, bed dimensions and flow rates. Only electrical power and pneumatic air supply is needed to operate these Helium/Argon Gas Purifiers.
These Helium/Argon Gas Purifiers can be installed into small areas because of the compact design and 1 meter front/rear access (zero-side clearance acceptable). The PS5 comes standard with GettSafe™ – the state-of-the-art solution to fast-response thermal protection. GettSafe quickly detects excessive heat in the getter column, and the built-in discrete hardware interlock takes action to isolate the purifier.
STANDARD FEATURES
- Fully Automated Microprocessor Controller
- Human Machine Interface (HMI)
- High Temperature Hardware Interlock
- GettSafe™ high temperature safety shutdown system
- Metal 0.003µm Particle Filter
- Inlet and Outlet sample ports with isolation valves
- Automatic Bypass
- Gas to Gas Heat Exchanger
- Electric Gas Preheater System
- Air Cooled Heat Exchanger
- All Metal cabinet with doors
- Alarm relay, life status indicator relay, remote contact shutdown, gas relay
- Relief valve
OPTIONAL FEATURES
- Inlet and Outlet isolation valves
- Inlet mass flow meter
- Instrument Air Management System
- Manual bypass valve
- Pneumatically actuated manual bypass valve
- Separate control power
- Uninterruptible Power Supply
- MODBUS data communication port
| PS5 Performance | ||
| Gases Purified | Impurities Removed | Outlet Performance |
| He, Ar | H2O, O2, CO, CO2, H2, N2, CH4 | < 1 ppb |
| Xe, Ne, Kr, Rn | Please consult the factory | Please consult the factory |
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Note: Purifiers are gas specific and should only be used for the gas indicated |
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| PS5 Specifications | ||||||
| Model | Maximum Flow (Nm3/hr) |
Maximum Pressure Drop (bar) |
Dimensions (cm) | Weight (kg) |
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| H | W | D | ||||
| PS5-MGT15 | 15 | 0.7 | 185 | 61 | 89 | <204 |
| PS5-MGT30 | 30 | 0.7 | 185 | 61 | 89 | <204 |
| PS5-MGT50 | 50 | 1 | 185 | 61 | 89 | <240 |
| PS5-MGT100 | 100 | 1 | 185 | 120 | 89 | <500 |
| PS5-MGT150 | 150 | 1 | 185 | 180 | 89 | <750 |
| PS5-MGT200 | 200 | 1 | 185 | 242 | 89 | <1,000 |
| Note: For flow rates less than 6 Nm3/hr (100 slpm) the MonoTorr Point-of-Use Purifierscan be used | ||||||
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PS5-MGT30 Helium/Argon Purifier
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PS5-MGT150 Helium/Argon Purifier |
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PS5-MGT50 Helium/Argon Purifier
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For outdoor installation see our outdoor enclosure options (OPAL)
Factory regenerable bulk gas purifiers, PS14
