PS22 CDA (Clean Dry Air) Purifiers
The CDA MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance.
The PS22 CDA Purifiers use ambient temperature adsorption processes designed specifically to provide UHP CDA for lithography, inspection, or metrology semiconductor applications. Outlet impurity levels for CO2, H2O and trace impurities including TOC’s (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids and NOx, are reduced to below parts per billion (ppb) levels with these Clean Dry Air Purifiers.
Standard Features:
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
Optional Features:
- Inlet & Outlet Isolation Valves
- Mass flow meter with 4-20mA Output
- Inlet & Outlet Pressure Transducers
- Auto or Manual Bypass
- Instrument Air Management System
- Ultrafine 0.003 micron particle filter
- Separate control power
| PS22 Performance | ||
| Gas Purified | Impurities Removed | Outlet Performance |
| CDA | H2O, CO2 | < 100 ppt |
| Organics, Acids, Bases, Refractory Compounds | < 10 ppt | |
| Note: Purifiers are gas specific and should only be used for the gas indicated | ||
| PS22 Specifications | ||||||
| Model | Maximum Flow (Nm3/hr) |
Maximum Pressure Drop (bar) |
Dimensions (cm) | Weight (kg) |
||
| H | W | D | ||||
| PS22-MGT10 - PS22-MGT30 | 10 - 30 | 0.7 | 138 | 80 | 40 | <110 |
| PS22-MGT40 - PS22-MGT60 | 40 - 60 | 0.7 | 168 | 87 | 61 | <180 |
| PS22-MGT90 - PS22-MGT120 | 90 - 120 | 0.7 | 165 | 100 | 70 | <300 |
| PS22-MGT200 - PS22-MGT300 | 200 - 300 | 1 | 193 | 132 | 135 | <1,500 |
| PS22-MGT400 - PS22-MGT900 | 400 - 900 | 1 | 209 | 148 | 196 | <2,300 |
| PS22-MGT1000 - PS22-MGT1400 | 1,000 - 1,400 | 1 | 239 | 191 | 236 | <2,300 |
| PS22-MGT1500 - PS22-MGT3000 | 1,500 - 3,000 | 1 | 264 | 252 | 262 | <5,600 |
| PS22-MGT4000 - PS22-MGT5000 | 4,000 - 5,000 | 1 | 264 | 252 | 262 | <6,000 |
| PS22-MGT6000 - PS22-MGT10000 | 6,000 - 10,000 | 1 | 267 | 252 | 467 | <10,500 |
| >PS22-MGT10000 | >10,000 | Models available. Please contact the factory. | ||||
For outdoor installation see our outdoor enclosure options (OPAL)
Factory regenerable bulk gas purifiers, PS14
