Glossary of Terms
Ambient
Surrounding environment. As used in gas purification: at room temperature no heat required.
Analyzer
An instrument used to detect impurities
Bulk Capacity
The amount of impurities that can be retained by a given purification media, such as getter
Breakthrough
The passing of impurities through a purifier.
Catalyst
A reactive component which aids in the conversion of oxygen and other compounds into a desired compound. Used as within some gas purifiers to convert CH4 into CO2 and H2O.
Chemisorption
The chemical condensation of a gaseous component (ie: a gas impurity) into the bulk of a solid media (ie: getter) such that the compound chemically combines with the media to form a new compound, thus both materials have been chemically changed and the initial compound is irreversibly trapped within the bulk of the solid media.
Getter
A reactive metal alloy. Getter will react differently in a given environment depending on the composition of the alloy (ie: how much zirconium, vanadium, titanium, etc. is in the mix). The getter alloy can be fine tuned to react a certain way by adjusting the type and amount of "ingredients" also the size and shape. The getter alloy in processed form is a powder. It can then be formed in different ways for different applications. It can be coated onto a surface or, as used in gas purification, compressed into a pellet about the size of a Tic-tac. For gas purification, the getter pellets are typically placed inside of vessels. These vessels are cylindrical in shape and range in size from 0.5" diameter and a few inches long to as large as 3.0' diameter and over 6.0' tall.
Getter Cartridge
See Getter Column
Getter Column
A vessel, filled with getter, for the purpose of gas purification, or may also be referred to as getter cartridges. Depending on the application, a getter column may be heated or not. Either way, the gas to be purified is flowed through the getter column, the getter reacts with the impurities present in the host gas, and thus impurities are irreversibly removed by the getter.
Getter Stabilized Zeolite (GSZ)
A purification media developed by SAES for ambient purification. Extremely high capacity for H2O and O2 removal.
Lifetime
The length of expected service of a gas purifier, getter cartridge (column), or adsorber before either replacement or regeneration is required.
Nm3/Hr
Normal Cubic Meters Per Hour. Unit of measure common to larger gas purifiers
Physisorption
The physical condensation of a gas on the surface of a solid. This process can be reversed by introducing heat.
Purifier
An instrument which removes unwanted impurities.
PPB
Parts per billion. 1 ppb = 1 in 1,000,000,000. Typical means of measuring gas purity
PPT
Parts per trillion. 1 ppt = 1 in 1,000,000,000,000
Point-Of-Use (POU)
The physical location within a process tool where gases are utilized.
SCCM
Standard Cubic Centemeters: Unit of measure common to very small gas purifiers
SCFH
Standard Cubic Feet Per Hour: Unit of measurement, common in U.S.
SLPM
Standard Liters Per Minute: Unit of measure common to point-of-use gas purifiers
Rare Gas
These are often called Noble or Inert Gases. Found on the right hand column of the Periodic Table of the Elements, the Rare Gases include Helium (He), Neon (Ne), Argon (Ar), Krypton (Kr), Xenon (Xe), and Radon (Rn). A SAES Purifier designated for Rare Gas will purify any of the above Rare Gases.
Regenerable
That which can be renewed or refreshed without replacing critical components
