Pressurized Gas Sampling System

The unique solid-state sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithography and inspection/metrology equipment with a dedicated, simple, and reliable tool for optics purge gas certification. Utilizing solid-state traps the CollectTorr Sampling System can measure parts per trillion (pptV) levels of molecular acids, bases, refractory and organic contaminants.

SAES Pure Gas analytical sampling, analysis and certification are compliant with lithography and inspection/ metrology tool optics warranty certification requirements.
For cleanroom air analysis information here.

• Brochure

Benefits

• Part-per-trillion volume sensitivity
• No liquid impingers are required
• Lower cost versus Impingers, because Factory Service Engineer not required to setup
• Compact design: easy to install, operate and ship
• Single sample point
• Solid-state trap sampling allows for any mounting orientation (with in-tool installation possible)
• Quick analysis turnaround time

Applications

• Lithography and inspection/metrology tool manufacturer optics purge gas certification
• Pre/Post purification molecular contamination level assessment
• Gas Piping and component outgassing validation

Logistics/Sampling Steps

1. SAES Pure Gas ships the CollectTorr
2. Install the CollectTorr manifold to a single sample port; open valve to begin sample flow
3. After sampling is complete send to SAES Pure Gas Analytical Department.
4. Analytical Certification Report delivered within 5 days. 

Speciation and Typical Sensitivity

Based on 24 hours sampling, lower sensitivities can be acquired with longer sampling times.