Cleanroom Air / Ambient Air Sampling System:

The unique solid-state sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithography and inspection/metrology equipment with a dedicated, simple, and reliable tool for chemical filter certification and cleanroom air certification. Utilizing solid-state traps the CollectTorr Sampling System can measure parts per trillion (pptV) levels of molecular acids, bases, refractory and organic contaminants.

SAES Pure Gas analytical sampling, analysis and certification are compliant with lithography and inspection/ metrology tool optics warranty certification requirements.
Pressurized gas sampling information here.

• Brochure

Benefits

• Internal pump pulls in Ambient or Cleanroom Air
• Part-per-trillion volume sensitivity
• No liquid impingers are required
• Lower cost versus Impingers, because Factory Service Engineer not required to setup
• Compact design: easy to install, operate and ship
• Single sample point
• Solid-state trap sampling allows for any mounting orientation (with in-tool installation possible)
• Quick analysis turnaround time

Applications

• Lithography and inspection/metrology tool manufacturer cleanroom certification
• Cleanroom and chemical filter certification
• Gas Piping and component outgassing validation

Logistics/Sampling Steps

1. SAES Pure Gas ships the Ambient Air CollectTorr
2. Place CollectTorr in test area and sample.
3. After sampling is complete send to SAES Pure Gas Analytical Department.
4. Analytical Certification Report delivered within 5 days. 

Speciation and Typical Sensitivity

Based on 4 hour sampling, lower sensitivities can be acquired with longer sampling times.