RMA Guidelines

Contact Entegris Customer Service via e-mail at:gp.fse@entegris.com

Please provide the following information with your RMA Request:

• Contact name
• Contact phone number
• Return shipping address
• Purchase Order (for non-warranty)
• Purifier model
• Purifier serial number
• Description of part being returned
• Reason or description of failure
• If necessary, a completed Declaration of Contamination This form is needed for all returns of purifiers for regeneration or components that come into contact with the gas stream (MFC, MFM, PX, etc.). If returning a purifier for Regeneration Service, please review the information on the Regeneration Services page

Ship To Address:
Entegris, Inc.
Attn: RMA Returns (RMA#)
4175 Santa Fe Road
San Luis Obispo, CA, 93401
Tel: 805.541-9299
Fax: 805.541.9399
Please ensure to mark the RMA # on the outside of all return packaging for prompt disposition once received at SPG.